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Electron-Beam-Induced Carbon Contamination on Silicon: Characterization Using Raman Spectroscopy and Atomic Force Microscopy
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- Journal:
- Microscopy and Microanalysis / Volume 16 / Issue 1 / February 2010
- Published online by Cambridge University Press:
- 24 December 2009, pp. 13-20
- Print publication:
- February 2010
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- Article
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