Schottky properties of Mo on diamond with fluorine- and oxygen-termination had
been investigated. Oxygen-termination was generated by aqua regia.
Fluorine-termination was generated by CF4 plasma treatment. Mo/Ni/Au
was deposited on the diamond surface as Schottky electrode, whose barrier height
was evaluated from current-voltage curve. After that, the X-ray photoelectron
spectroscopy methods were applied to calculate the Schottky barrier height of Mo
on different termination surface. The results indicated that the
fluorine-termination and oxygen-termination show different schottky