Tin oxide has been proposed as a promising alternative anode material for microbatteries. It has been reported that its theoretical volumetric capacity is four times larger than that of carbon-based materials, while its gravimetric capacity is twice as large. In this experiment, optimal Si and Bi doped SnO2 films were prepared with e-beam evaporation to improve both the cycle performance and the reversible capacity. The films with addition of Si only exhibited reductions in aggregation of tin particles and formation of micro-cracks. However, there still remained cracks, which induce capacity loss during cycling. To improve capacity retention, Bi was added with Si to SnO2 films, which exhibited the highest reversible capacity of 200µAh/cm2-µm at 200th cycle. The films doped with Bi and Si were found to be ill-defined and featureless without noticeable particle aggregation and cracks. However, the films that underwent cycling tests showed again aggregated tin particles and formation of cracks, which would induce cell failure during cycling. We believe that some types of Li-Bi phases as mixed-conductor matrices have improved the cycle life.