The experimental analysis of dry laser cleaning efficiency is done for certified spherical particle (SiO2, 5.0, 2.5, 1.0 and 0.5 μm) from different substrates (Si, Ge and NiP). The influence of different options (laser wavelength, incident angle, substrate properties, i.e. type of material, surface roughness, etc.) on the cleaning efficiency is presented in addition to commonly analyzed options (cleaning efficiency versus laser fluence and particle size). Found laser cleaning efficiency demonstrates a great sensitivity to some of these options (e.g. laser wavelength, angle of incidence, etc.). Partially these effects can be explained within the frame of the Mie theory of scattering. Other effects (e.g. influence of roughness) can be explained along the more complex line, related to examination of the problem “particle on the surface” beyond the Mie theory. 0.5 μm spherical silica particles were placed on Silicon (100) substrate. After laser irradiation with a 248 nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. Mechanism of the formation of the sub-wavelength structures were investigated and found to be the near-field optical resonance effect induced by particles on surface. Theoretical prediction of the near-field light intensity distribution was presented, which was in agreement with the experimental result.