Pd-rich Co-Pd alloy films are well known to exhibit perpendicular anisotropy. In this study, Co35Pd65 films were made by the vapor deposition method. The thickness of the films ranged from 80 to 2000 Å. Following measurements were carried out on each film sample: the impurities and alloy compositions were checked by Auger depth profile analysis (AES), the surface topology was mapped out by an atomic force microscope (AFM), the structural analysis was done by using the X-ray diffractometer (XRD), and the magnetic properties, such as magnetic anisotropy and saturation magnetization, were measured by a SQUID magnetometer and/or a MOKE (using the longitudinal or polar effect) apparatus. Magnetic quantities, such as the out-of-plane (either hard or easy axis) squareness ratio Mr/Ms, saturation magnetization Ms, and anisotropy energy Ku, are closely related to the structural properties, such as the degree of (111) texture, grain size D, mode of growth (nucleation texture or growth texture), and impurities in films. The emphasis is placed on the thickness dependence of these quantities, and the interrelationship among them.