Recently, energy filtering technique in the transmission electron microscopy (EF-TEM) is becoming widely used in both materials and biological science.
In this paper, newly developed EF-TEMs for both 200 kV (JEM-2010FEF) and 300 kV (JEM- 3100FEF) are introduced. Figure 1 shows appearances of the instruments. Those instruments have a field emission gun and an OMEGA type spectrometer.
The features of JEM-2010FEF and JEM-3100FEF EF-TEMs are as follows [1,2]:
1. 3 pre-filter lenses and 3 post-filter lenses are used.
Additional intermediate lens is employed for covering filtered images in low magnification range from x200 - x 1,500,000 magnification for JEM-2010FEF, x200 - x2,000,000 for JEM- 3100FEF. in diffraction mode, from 200 mm - 2,000 mm in camera length for JEM- 2010F, 200 mm- 1,500 mm are covered for JEM-3100FEF.
2. Large energy dispersion.
The energy dispersion is 1.2 μm/eV at 200 kV and 0.85 μm/eV at 300 kV.