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Depth Profiles of High-energy Recoil Implantation of Boron into Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B6.8
- Print publication:
- 2000
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- Article
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Ultra-shallow Junction Formation via GeB- ion Implantation of Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B4.5
- Print publication:
- 2000
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- Article
- Export citation