In this paper, we report a study of the degradation of AlGaN-based 280 nm LEDs, which were grown on sapphire substrates using migration-enhanced metalorganic chemical vapor deposition process (MEMOCVD). Electroluminescence (EL), atomic force microscopy (AFM), cathodoluminescence (CL), and scanning electron microscopy (SEM) observations showed that the degradation of deep UV LEDs generally fell into two categories: catastrophic degradation and gradual degradation. The catastrophic degradation was found to be mostly caused by the non-uniformity of surface morphology. The gradual power reduction had two characteristic time constants indicating two possible degradation mechanisms as found from temperature and bias dependent LED power degradation measurements. The faster time constant was bias dependent and virtually constant with temperature whereas the second time constant (slower) varied exponentially with junction temperature. For this temperature dependent part, the activation energies of degradation were determined to be 0.23 eV and 0.27 eV under injected current density of 100 A/cm2 and 200 A/cm2 respectively.

In this paper, using chemical etching, atomic force microscope (AFM) and High- resolution X-ray diffraction (HRXRD), we report a study of the effect of various small miscuts of (0001) sapphire substrate (<1°) and the way to further improve the material quality. A set of AlN epilayers and AlN/AlxGa1-xN Superlattices (SLs) were grown by Migration-enhanced Metalorganic Chemical Vapor Deposition (MEMOCVD) on vicinal (0001) sapphire substrates. The threading dislocation density was found to be very sensitive to the miscut angles. The etch pit density reduced to 7×106 cm-2 for normal-oriented (0°-off) from the starting value of 7×107 cm-2 for 0.5°-off. We found the surface morphologies can be easily controlled by the different substrate miscut angles. The 1-2 Monolayers (MLs) step flow morphology for normal- oriented substrate changed to step bunches of 10 MLs height for 0.5°-off substrate. Correspondingly, AFM Root Mean Square (RMS) increased from 1.52 to 9.15 Å with a 5um×5um scan. This finding may help enhance the quality of full structure UVLED material and eventually improve the lifetime of UVLEDs.