Interdifussion studies were performed on high-Tc
superconducting multi layer structures. As substrates, Si(lll)/NiSi2/ZrO2, Si(lll)/ZrO2, Yttria Stabilized ZrO2 (YSZ), SrTiO3, MgO, A12O3 and LaA1O3 (100) single crystals were used. Also interface studies on YSZ(100)/YBa2Cu3O7-x/PrBa2Cu3O7/YBa2CU3O7-x and A12O3/PrBa2Cu3O7/ YBa2Cu3O7-x multi layer structures were performed. It is shown that the combination of different surface analysis techniques yields detailed insight in effects of reactions, diffusion and segregation on the structure and composition of interfaces in high-Tc
, superconducting multi layer structures.