The newly developed Hot Wall Beam Epitaxy was used for the growth of (100)CdTe and (100)Cd1-yZnyTe layers (y ∼ 0.04) on 1 inch (100)GaAs wafers. The structural properties of the epilayers were investigated by means of high resblution x-ray rocking curve measurements. The results demonstrate the high crystalline perfection of the layers. The CdTe and Cd1-yZnyTe/GaAs wafers were used as substrates for the growth of Hg1-xCdx Te by close space vapor phase epitaxy. The layers show excellent homogeneity. Across a 1 inch wafer the composition x varies by ±0.0026, and the width of the rocking curve (FWHM) by ±10arcsec. Values of the FWHM as low as 50arcsec for Hg1-xCdxTe (x = 0.32) on Cd1-yZnyTe/GaAs were obtained. Linear arrays of planar photovoltaic detectors were fabricated. Arrays of 32 elements show high uniformity of the cutoff wavelength and the responsivity. The variation of the cutoff wavelength is ±1.5% (±0.04μm) and the variation of the responsivity is ±3%.