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The phase diagram of eptaxial BaTiO3 films in the coordinates of T and αs ( substrate thermal expansion coefficient) is constructed on the basis of the thermodynamic analysis which has been carried out earlier . It is found that two new phase are formed under bi-axial stress. The temperature dependencies of polarization and unit cell parameters for the films on the KTaO3 and SrTiO3 substrates are also calculated.
Surface and cross-section relief evolution of ferroelectric epitaxial (Ba,Sr)Ti03 films rf-sputtered on (001) MgO crystal cleavage surfaces versus the oxygen worKing gas pressure P and substrate temperature T were studied. Specific features of both three-dimensional and two-dimensional epitaxy mechanisms corresponding to various deposition conditions were revealed. Difference between low and high P-T-value 3D epitaxy was established. the deposition of films with mirror-smooth surfaces and perfect interfaces is shown to be possible.
The problem of phase transitions and physical properties of the BaTiO3-type films on the (001) single-crystal substrates of the cubic syngony was solved in the limits of the Landau- Devonshire thermodynamics. The thermoelastic film-substrate interaction caused by the difference between thermal expansion coefficients was strictly taken into consideration. The model was based on the following assumptions: 1) the film is closely conjugated with the substrate; 2) the film is sufficiently “thick”to find itself unstrained at the growth temperature Ts, ( growth stresses were compensated by misfit dislocations ), and 3) the film is sufficiently “thin, and the stresses arising at the temperatures T>Ts may be considered to be uniform.
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