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Automatic Determination of In-Depth Profiles of Recombination Lifetime in Epitaxial Si Layer with P+-N−-N+ Stripe Test Pattern Diodes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 225 / 1991
- Published online by Cambridge University Press:
- 15 February 2011, 265
- Print publication:
- 1991
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- Article
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