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The ability to measure the temperature-dependence of the hardness of thin films is useful from both an applications and a scientific standpoint. For this reason, we have designed and constructed a load- and depth-sensing indentation tester combining sub-nanometer resolution with the ability to operate over a range of temperatures, currently 150K to 400K. This paper describes the new experimental apparatus and reports preliminary data on 440C stainless steel substrates with and without a 0.75 μm ZrN coating.
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