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Novel polyelectrolyte–Al2O3/SiO2 composite nanoabrasives for improved chemical mechanical polishing (CMP) of sapphire
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- Journal:
- Journal of Materials Research / Volume 34 / Issue 6 / 28 March 2019
- Published online by Cambridge University Press:
- 03 January 2019, pp. 1073-1082
- Print publication:
- 28 March 2019
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- Article
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