Recently there has been a growing interest in the field of X-Ray MicroFluorescence (XRMF) for analyzing small areas (with sizes greater than about 10 microns diameter). Several recent papers have described prototype systems for this kind of analysis, with particular emphasis on the elemental imaging applications. However, the technique of small-area XRF analysis is not new. For example, Bertin gives an excellent review of much of the earlier work (up to the late 1960s), which used a variety of focusing (with curved crystals) or collimation techniques. Several wavelength dispersive spectrometer systems were modified for small-spot analysis. One of the earliest spectrometers was the X-ray Milliprobe developed by Adler and Axelrod, which employed curved crystals.