Using solution chemistry, epitaxial films of rare-earth oxides of the general formula RE2O3 (where RE = Sm to Lu) were prepared on cubic-textured nickel tapes. Solutions of metal methoxyethoxides or metal acetate/methoxyethoxides in 2-methoxyethanol were used to coat rolltextured nickel tapes using either spin-coating or dip-coating. Coated tapes were subsequently heated in a reducing atmosphere at temperatures between 950 °C and 1160 °C for varying lengths of time. Film quality was determined using X-ray diffraction and electron and surface probe microscopy. Films were found to be oriented both in and out-of-plane of the substrate, free of pinholes and gross defects, and of sufficient quality for use as substrates for high Tc, superconductors.