In this paper, the effect of substrate on the domain structure growth and electrical and magnetic properties of epitaxial Mn-doped Zn0.8Mn0.15O (ZnMnO) thin films has been investigated. Epitaxial thin films of ZnMnO dilute magnetic semiconductors (DMS) were grown on various substrates such as single crystal sapphire, single crystal silicon, and quartz substrates using Pulsed Laser Deposition (PLD) technique . Structural, surface, magnetic, and optical properties have been observed on these films using X-Ray diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), and Raman spectroscopy. X-Ray Diffraction shows that films are highly epitaxial and c-axis oriented with some induced strain. AFM images show that film surface is smooth with RMS roughness of the order of 1-2 nm over 5*5sq.micron. Magnetic characteristic properties such as carrier concentration, mobility, and temperature dependent resistivity were also investigated. Carrier concentration decreases and mobility increases for both the films on silicon and quartz substrates when compared to film on sapphire.