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A simple dynamic model to investigate the relative fluxes and particle velocities on a spacecraft’s different faces is presented. The results for LDEF are consistent with a predominantly interplanetary origin for the larger particulates, but a sizable population of orbital particles with sizes capable of penetrating foils of thickness <30μm. Data from experiments over the last 30 years do not show the rise in flux expected if these were space debris. The possibility of a population of natural orbital particulates awaits confirmation from chemical residue analysis.
In this paper, we describe the results of recent work in which TiSi2 formation on deep-submicron polysilicon gates is achieved using pulsed excimer laser irradiation. Formation of low resistivity titanium suicide on sub-0.1 μm polysilicon lines is confirmed by sheet resistance measurements. High-resolution TEM examination shows exceptionally smooth interface between suicide and heavily-doped silicon substrate. Gate to source/drain bridging is not observed. Analytical techniques including Rutherford backscattering spectroscopy (RBS) and X-ray diffraction (XRD) have been used to characterize the irradiated films. This laser-assisted suicide formation process is a promising technology for extreme submicron MOSFET applications.
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