Self-diffusivity of Si has been obtained over a wide temperature range (867°C-1300°C) using highly isotopically enriched 30Si epi-layers (99.88%) as a diffusion source into natural Si substrates. 30Si epi-layers were grown on both CZ-Si substrates and non-doped epi-layers grown on CZ-Si substrates using low pressure CVD with 30SiH4. Diffusion was performed in resistance-heated furnaces under a pure Ar atmosphere. After annealing, the concentrations of the respective Si isotopes were measured with secondary ion mass spectroscopy (SIMS). Diffusivity of 30Si (called Si self-diffusivity, DSD) was determined using a numerical fitting process with 30Si SIMS profiles. We found no major differences in self-diffusivity between bulk Si and epi-Si. Within the 867°C -1300°C range investigated, DSD can be described by an Arrhenius equation with one single activation enthalpy: DSD =14 exp (—4.37 eV/kT) cm2/s. The present result is in good agreement with that of Bracht et. al.
Diffusivity and thermal equilibrium concentration of Si self-interstitials have been determined using multi-30Si epi-layers consisting of alternative layers with isotopically pure 30Si and natural Si. The sample surface was oxidized and the Si self-interstitials were introduced from the surface. Spreading of 30Si spikes of each layer due to the diffusion of Si self-interstitials generated at the surface was measured with SIMS analysis. The diffusivity of Si self-interstitials, D
I, is obtained by fitting with experimental results. In the temperature range between 820 -920°C, D
I and thermal equilibrium concentration of Si self-interstitials, CIi, are described by the Arrhenius equations D
I3.48×104 exp (—3.82eV/KT) cm2/s and C
Ii= 9.62×1018 exp (—0.475eV/KT) cm-3, respectively.