Diluted magnetic semiconductors (DMS) have been explored extensively, because of their potential application in spintronic devices. We studied the structural optical and magnetic properties of Ti1-xMxO2 (M= Fe, Mn, Co; x = 0.00, 0.05, 0.08, 0.10, 0.15, 0.20, 0.25, 0.30), thin films by sol-gel process and deposited using spin coating on Pt (Pt/Ti/SiO2/Si) and quartz substrates. X-ray diffraction studies and Raman spectroscopy reveal anatase and rutile phases of the synthesized films when annealed at 500 and 10000 C, respectively. Optical transmission measurements show high degree of transparency that decreases with increase in transition metal ion concentration. The films show room temperature ferromagnetism, suggesting their potential in spin based heterojunction devices.