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The Electrical Phenomena of Non-planar Structure and Devices using Plasma Doping
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- Journal:
- MRS Online Proceedings Library Archive / Volume 864 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, E9.15
- Print publication:
- 2005
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The Influence of Low Temperature Pre-Annealing on the Defect Removal and the Reduction of Junction Depth in Excimer Laser Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 717 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, C1.12
- Print publication:
- 2002
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- Article
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Ultra - Shallow p+/n Junction Formed by Plasma Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B3.7
- Print publication:
- 2000
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