A synchrotron radiation X-ray micro analyzer(SRXMA) was developed at Photon Factory in Japan. The present SRXMA combines a double crystal monochromator and mirror optics and either a white or a monochromatic microbeam can be used. Micro X-ray fluorescence analysis was carried out, and a minimum detection limit of 1 ppm for Mn was obtained for 100 sec measurement with the white beam. With monochromatic beam excitation, micro X-ray spectroscopies are now feasible.
The obtained beam size was 1.6 μ;m - 34 μm* The beam was blurred in one direction by the scattered X-rays caused by the surface irregularities of the focusing mirror. Improvements in the mirror quality will ensure a beam spot of just a few microns with sufficient intensity.