3 results
Chemical-mechanical Polishing of Copper Using Molybdenum Dioxide Slurry
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- Journal:
- Journal of Materials Research / Volume 20 / Issue 9 / September 2005
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2553-2561
- Print publication:
- September 2005
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Study of Slurry Composition Transition in a Rotary Copper CMP Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F1.5
- Print publication:
- 2003
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Mixed Abrasive CMP: A Study on Metal and Dielectric Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I3.6
- Print publication:
- 2002
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