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Exploration of the Scaling Limits of 3D Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 970 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 0970-Y02-01
- Print publication:
- 2006
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- Article
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Study of Cobalt Salicide Fabrication on Sub-Quarter Micron Polysilicon Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 163
- Print publication:
- 1996
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- Article
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