We have fabricated sub-100 nm triangles NiFe triangle arrays using NSL and the MOKE measurement and micromagnetic simulations were carried out to investigate the reversal mechanism of the arrays. Enhancement of coercivity compared to the thin film was observed in all the three arrays but in different degree from the MOKE measurement. With the increase of the lateral size of the triangle, the effect of the coercivity enhancing decreases. Micromagnetic simulation shows that instead of domain wall nucleation and annihilation in the thin film, the reversal mechanism of the 45 and 80 nm triangles is dominated by the coherent rotation. While in the 100 nm triangle, the magnetic reversal takes place via forming and reversing a V like sate.