Light detection system combined with a UHV-scanning tunneling microscope (STM) was applied to the study of silver films deposited on Si(111) surfaces. Photon maps clearly show single atom height steps and terraces on an Ag(111) surface with high spatial resolution of nanometer scale. Chemical reaction on the Ag surface with residual gas was clearly revealed in the photon map. In the photon map of the thin Ag film of 2˜3 ML in thick, no contrast appears between the terraces, and a characteristic bright contrast appears at the single atom height steps. The local plasmon model does not readily explain those contrasts.