The intermetallic matrix composites reinforced with heat-resistive fibers are expected to improve the ductility and the toughness of intermetallic compounds. Titanium aluminide, TiAl, shows a unique behavior that increases the mechanical strength with increasing temperature up to 1000 K. Vapor phase processings for manufacturing near-net-shaped composites or continuous fiber-reinforced composites will be hopeful methods. The synthesis of TiAl by a magnetron sputtering using a multiple target has been successfully established, and the microcomposites with SiC fibers have been prepared. The TiAl film was evaluated by Auger electron spectroscopy and the x-ray analysis and so on. The tensile strength properties of the SiC/TiAl microcomposites, of which the interface bonding was controlled with the powers of sputtering, were estimated. The results show that the strength properties of SiC/TiAl microcomposites are decreasing with increasing the power of the sputtering, and the irradiation-cured SiC fiber has better compatibility with TiAl than the oxidation-cured SiC fiber.