Carbon fine particles including single-walled carbon nanotubes (SWNTs) were synthesized by hot-filament and plasma assisted chemical vapor deposition. Specific surface area was evaluated for carbon fine particles synthesized under optimized conditions along with purified SWNTs and multi-walled carbon nanotubes (MWNTs) for comparison. The value of specific surface area for the synthesized carbon fine particles was smaller than the SWNTs, but larger than the MWNTs. Pore size distribution was analyzed with desorption isotherms by the DH method. Although smaller pores are included in the purified SWNTs than the synthesized carbon fine particles, pores of size larger than several nm were included more in the synthesized carbon fine particles.