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In this work, we analyze the pressure sensing of a thin film molybdenum/aluminumnitride/molybdenum (Mo/AlN/Mo) microwave/RF MEMS filter fabricated by a simple technology. After an experimental characterization in a frequency range between 1 and 36 GHz, we focused on the piezoelectric effect due to the stress properties of the piezoelectric AlN layer by applying forces by means of weights. Variations in the bandpass region of the microwave/RF filter are observed by proving high sensitivity also for low applied weights. We check by a properly designed three-dimensional (3D) finite-element method (FEM) tool the pressure-sensing property of the proposed device. Finally, we analyze the bad gap property of a chip with central defect around 40 GHz.
We present the fabrication of a pixels structure by a well-defined pattern replication of a micrometer template driven by a surface free-energy lithographic technique, realized by molecular aggregation in dewetting conditions and by confining the liquid solution with geometric boundaries. The organization in the solid-state of the selected thiophene-based molecular materials allows to realize a bicoloured, green and red-emitting pixels structure, by exploiting the molecular structural arrangement, induced during a dewetting process, and the great conformational flexibility of DTT7Me.