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The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B02-06
- Print publication:
- 2007
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Depth-profiling Pore Morphology in Nanoporous Thin Films Using Positronium Lifetime Annihilation Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B1.6
- Print publication:
- 2005
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Determining Pore Structure and Growth Mechanisms in Templated Nanoporous Low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B3.4
- Print publication:
- 2005
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- Article
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