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In this work we present a rigorous investigation of the negative bias temperature instability (NBTI) recovery process during measurement intervals in comparison to the numerical solution of an extended reaction-diffusion (RD) model. In contrast to previous work, the RD model has been implemented in a multi-dimensional device simulator and is solved self-consistently together with the semiconductor device equations. This allows us to directly use many commonly approximated quantities such as the oxide electric field and the interface hole concentration in a self-consistent manner. In addition, the influence of the trapped charges can be more accurately considered by using a distributed Shockley-Read-Hall interface trap-charge model which has been coupled to the RD model. Thus, due to the self-consistent solution procedure, also the feedback of these charged interface-states on the Poisson equation is considered which influences the observed threshold voltage shift. Experimental data confirm the model which has been calibrated to a wide range of temperatures using a single set of parameters.
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