4 results
Radio-Frequency Impedance Analysis of Anodic Tantalum Pentoxide Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 699 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, R6.5
- Print publication:
- 2001
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Fabrication of Ta2O5 Thin Films by Anodic Oxidation of Tantalum Nitride and Tantalum Silicide: Growing Mechanisms, Electrical Characterization and ULSI M-I-M Capacitor Performances
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- Journal:
- MRS Online Proceedings Library Archive / Volume 567 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 371
- Print publication:
- 1999
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Control of Microstructure and Stress in Sputtered Tungsten Thin Films on Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 226 / 1991
- Published online by Cambridge University Press:
- 26 February 2011, 235
- Print publication:
- 1991
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Investigation of Metal Induced Surface Defects in Czochralski Si Following Rapid Thermal Processing by Thermal Wave Modulated Reflectance Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 81
- Print publication:
- 1991
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