2 results
Measurement of Lateral Dopant Diffusion in Rapid Thermal Annealed W-Polycide Gate Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 121
- Print publication:
- 1996
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- Article
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X-Ray Strain Measurements in Fine-Line Patterned AL-CU Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 338 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 203
- Print publication:
- 1994
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- Article
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