Inorganic-organic hybrid polymers (ORMOCE®s) combine very good optical and dielectricproperties in the frequency range up to 1 MHz (εr = 3.1 and tanδ = 0.004, both at 1 MHz). Thisis particularly promising for electro-optical (e/o) applications. Multi-layer microwave circuits forhigh frequency applications up to 100 GHz demand extraordinary material properties such as alow permittivity εr < 3 and a dielectric loss tanδ of about 10-3. For low-cost processing, direct UVpatterning would be particularly advantageous. Additionally, the material should be thermallystable at least up to temperatures around 300°C.
We have developed a series of novel ORMOCE® materials for high frequency applications.Using these ORMOCE®s, thick film coatings (up to 150 m) can be produced and directlypatterned by UV lithography with sufficiently high resolution. The synthesis has been carried outusing styrene-substituted organosilanes and silanediols as precursors reacted by simplified solgel-processing in combination with organic cross-linking of polymerizable organic functions.The materials have been characterized at high frequencies up to 40 GHz, exhibiting verypromising dielectric properties of εr = 2.5 and tanδ = 0.0035.