Atomic force microscopy (AFM) phase imaging and tensile stress-strain measurements are used to study a series of model compression molded fumed silica filled polydimethysiloxane (PDMS) samples with filler content of zero, 20, 35, and 50 parts per hundred (phr) to determine the relationship between filler content and stress-strain properties. AFM phase imaging was used to determine filler size, degree of aggregation, and distribution within the soft PDMS matrix. A small tensile stage was used to measure mechanical properties. Samples were not pulled to break in order to study Mullins and aging effects. Several identical 35 phr samples were subjected to an initial stress, and then one each was reevaluated over intervals up to 26 weeks to determine the degree to which these samples recovered their initial stress-strain behavior as a function of time. One sample was tested before and after heat treatment to determine if heating accelerated recovery of the stress-strain behavior. The effect of filler surface treatment on mechanical properties was examined for two samples containing 35 phr filler treated or untreated with hexamethyldisilazane (HMDZ), respectively. Fiduciary marks were used on several samples to determine permanent set. 35 phr filler samples were found to give the optimum mechanical properties. A clear Mullins effect was seen. Within experimental error, no change was seen in mechanical behavior as a function of time or heat-treatment. The mechanical properties of the sample containing the HDMZ treated silica were adversely affected. AFM phase images revealed aggregation and nonuniform distribution of the filler for all samples. Finally, a permanent set of about 3 to 6 percent was observed for the 35 phr samples.