The parallel nano-scanning calorimeter (PnSC) is a silicon-based micromachined device for calorimetric measurement of nanoscale materials in a high-throughput methodology. The device contains an array of nanocalorimeters. Each nanocalorimeter consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The small mass of the individual nanocalorimeters enables measurements on samples as small as a few hundred nanograms at heating rates up to 104 K/s. The sensitivity of the device is demonstrated through the analysis of the melting transformation of a 25-nm indium film. To demonstrate the combinatorial capabilities, the device is used to analyze a Ni–Ti–Zr sample library. The as-deposited amorphous samples are crystallized by local heating in a process that lasts just tens of milliseconds. The martensite–austenite transformation in the Ni–Ti–Zr shape memory alloy system is analyzed and the dependence of transformation temperature and specific heat on composition is revealed.

A new device is presented for the combinatorial analysis of complex nano-scale material systems. The parallel nano-differential scanning calorimeter (PnDSC) is a micro-machined array of calorimetric cells. This new approach to combinatorial calorimetry should expedite the analysis of nano-scale material thermal properties. A power compensation differential scanning calorimetry measurement, not yet performed on a device of this type, is described. A NiTi specific heat measurement demonstrates the scanning calorimetry capability of the PnDSC.

Fe-Pd thin films with approximately 30 at.% Pd have been produced by magnetron sputtering. Various heat treatment conditions were studied in order to obtain the face-centered tetragonal (fct) martensitic phase at room temperature. X-ray diffractometry was used to identify the various phases present at room temperature and the substrate curvature technique was employed to measure film stress as a function of temperature. The shape memory effect was demonstrated in samples containing the fct martensite phase at room temperature.