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Advanced Ion Source Technology for High Resolution and Stable FIB Nanofabrication employing Gallium and new Ion Species
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 312-313
- Print publication:
- August 2014
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Multi-Species Focused Ion Beam Processing for III-V Semiconductor Materials
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- Journal:
- Microscopy and Microanalysis / Volume 18 / Issue S2 / July 2012
- Published online by Cambridge University Press:
- 23 November 2012, pp. 616-617
- Print publication:
- July 2012
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