We have explored the effects of ion beam irradiation on the electrical and structural properties of superconducting thin films of YBa2Cu3O7-δ. Damage created by nuclear energy loss processes degrades the superconducting transitions. In general, the onset temperatures do not vary significantly with ion fluence, but the transition widths broaden until the resistance no longer reaches zero. This behavior is strikingly similar to that observed in granular superconducting films where islands of superconductor are progressively decoupled from each other, destroying the phase coherence. Data from resistance measurements as well as from Rutherford Backscattering and channeling measurements suggest that ion bombardment is not changing the volume fraction of superconducting material substantially.