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3 results

  • AFM Integrated with SEM and FIB: A Synergistic Union
  • Aaron Lewis, A. Komissar, A. Ignatov, Oleg Fedoroyov, E. Maayan, Dalia Yablon, H. Taha
  • Journal: Microscopy Today / Volume 21 / Issue 6 / November 2013
  • Published online by Cambridge University Press: 05 November 2013, pp. 26-31
  • Print publication: November 2013
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    Scanning electron microscopy (SEM) and ion beam milling techniques are mature nanoscale measurement technologies, whereas atomic force microscopy (AFM) is a developing technology generating intense interest in the scientific community for basic research and development. These techniques have generally existed in separate worlds. This article discusses a capability that marries these technologies through an instrument recently introduced by Nanonics, the 3TB4000.