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Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B7.9/O11.9
- Print publication:
- 2005
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- Article
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Strained Si-on-Insulator Fabricated from Elastically-Relaxed Si/SiGe Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 809 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, B1.3
- Print publication:
- 2004
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- Article
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