This study demonstrates that thin metallic oxide layers, such as OsOx and ZnO, function as a strong adhesion layer between Cu film and glass substrate. The adhesion strength was studied with a micro-scratch tester and the films and interfaces were characterized by energydispersive X-ray spectrometry. The presence of an extremely thin intermixing layer was confirmed at the metal/glass interfaces. The formation of such an interfacial layer increased the adhesion strength significantly.

In order to elucidate a link between density and structure of liquid Si-M (M=Fe, Ni, and Ge) alloys, synchrotron x-ray diffraction experiments have been conducted with the use of a conical nozzle levitation technique. Liquid structure factors of the Si-Fe and the Si-Ni alloys indicate a correlation of medium range ordering with the increase of the Si content. Although the total molar volume expands with the increase of the Si content in these alloys, the concentration dependence of the average interatomic distance shows a minimum around 70 at.% Si content. On the other hand, the Si-Ge alloys shows tendency of concentration dependence as ideal mixture in both total molar volume and the average interatomic distance. These results were discussed taking into account the formation of anisotropic bonds between 3d transition metal and Si atoms, which may induce a spatial expansion in the microscopic scale.

Clarifying the local amorphization on the grain boundaries, the in-situ observation during ion-irradiation was carried out for poly-crystalline Si film. The critical dose of amorphous formation increased exponentially with increasing temperature, where the local amorphization was developed at middle temperature. The critical dose was affected by the doped impurity and the grain size. The preferential amorphization on and near grain boundaries had two processes; first stage with rapid growth rate and second stage with almost constant growth rate. The importance of stress was demonstrated from the acceleration due to the stress on the first stage of amorphization.