Organic–inorganic perovskites have emerged as one of the most promising materials for future optoelectronics applications, most notably photovoltaics. The achievement of high-efficiency solar cells has been possible mainly through the understanding of the perovskite formation during the solution deposition of thin films. Vacuum deposition methods have also been developed and have intrinsic advantages over solution-based processing, including control over the film thickness and composition, low-temperature processing, and the possibility of preparing multilayer structures. This article summarizes the latest advances in the vacuum deposition of hybrid perovskites, with an emphasis on the application to photovoltaics. Methods for the deposition of perovskite thin films and the performances of the correspondent solar cells are reviewed.