The plasma polymerization replica method and the apparatus required were deviced by Tanaka. In this technique, ionized gas molecules from a glow discharge are instantly polymerized on the surface of a specimen. The polymerized molecules make a uniform, ultrathin film which precisely copies the three-dimensional ultrastracture of the specimen's surface. In the course of our study, we soon realized that the polymerized film would serve as a good support film. We report here a method of preparation of the new support film by plasma polymerization and its application.
Method of preparation: Newly cleaved NaCl or KC1 crystals of 1-2 mm thickness, newly cleaved mica, or coverglass were placed on the cathod plate in a bell jar of the Plasma nano-replica apparatus(PNR-110, Ushio Inc., Tokyo). After evacuation of air, the bell jar was filled with hydrocarbon monomer gas(naphthalene etc.) to about 10 Pa. A high voltage (2-2.5 kV D.C.) was then applied across the electrodes to generate a glow discharge, and a very thin, threedimensionally polymerized film was formed on the surface of substrates.