Cu2ZnSnS4 (CZTS) thin films were fabricated by using three RF co-sputtering continued with sulfurization method. The new type of thin film solar cells using CZTS as an absorber consists of buffer-layer and window-layer on CZTS films that were fabricated on a Mo-coated Soda Lime Glass (SLG) substrate. It was confirmed that CZTS solar cells with high conversion efficiency existed in a relatively narrow composition region. In this paper, the fabrication method of CZTS-based thin film solar cells in our laboratory was stated briefly and the influence of the composition ratio on the photovoltaic properties were presented. Furthermore, the properties of a genuine non-toxic solar cell using a Cd-free buffer-layer were introduced.