The structure of small particles attracts great interest for their distinctiveness. Small particles of several materials undergo lattice parameter change or crystal structure change and sometimes form multiply twinned particles (MTPs) . Configurational and structural fluctuations which they show under electron beam irradiation are also interesting phenomena . This quasi-molten state are well explained theoretically , but the exact cause of it is still a matter of debate [2,4].
To clarify the behavior of nanoparticles under electron beam more precisely, we grew indium, palladium and molybdenum nanoparticles on Si (110) TEM samples in situ and investigated with an ultrahigh vacuum field emission transmission electron microscope (UHV-FE-TEM). It is a JEOL-2000VF operated at 200 kV with a base pressure of the column less thari 2.0 x 1O−8 Pa. Two kinds of evaporators are attached to the column in order to perform in situ evaporation of metals; an electron beam (EB) evaporator for high melting temperature material and a thermal heating evaporator with tungsten wire for low melting temperature ones.