High Tc YBa2 Cu3 Oy and GdBa2 Cu3 Oy thin films can be made by a laser sputtering method using LnBa2 Cu3 Oy (Ln=Y and Gd) ceramics as targets and cubic zirconia as a substrate in a high vacuum system. The superconcucting onset temperature and the zero resistance temperature of the film are 95 and 80K, respectively. The surfaces of these films were subjected to an irradiation with a focused pulsed excimer laser. Scanning of the beam led to the etching of the surface to form a groove. Photochemical processes on these superconductor films were studied using dynamic mass-spectroscopic method.