In this study, thick sol-gel PZT(Pb(Zr1−xTix)O3) films were fabricated and their characteristics were investigated for angular rate sensor applications. The crack-free thick sol-gel PZT films were successfully deposited on silicon substrates by multiple spin-coating technique combined with rapid thermal annealing(RTA). The thickness of the PZT films is 1.5 νm, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT films is 12.0νC/cm2. The PZT films were applied to the vibration angular rate sensor structure, and the vibration of 1.78νm in amplitude at the resonant frequency of 35.8kHz was obtained. In this case, the driving voltage of 5Vp-p by bulk piezoelectric materials was applied to the driving electrode with out of phase signal through voltage and inverting amplifier.
The oscillating output voltage obtained by external actuation using a stacked piezo-actuator showed the values of 0.76V and 0.87V in outer/inner driving electrode at driving voltage of 5Vp-p.