To solve an image degradation problem of blurring for a-Si:H photoreceptors during the repetitions of electrophotographic process, effect of a-C:H:F overcoat layer has been investigated. The film is deposited by glow discharge decomposition of C2 F6 and H2 mixture gases. The hydrophobic property of the film is estimated by contact angle of water drop. The contact angle of a-C:H:F is larger than that of a-SiC:H especially after 5 hours corona exposure treatment. In the printing test, the blurring life time of a-C:H:F overcoated a-Si:H photoreceptor becomes longer about 9 times than that of a-SiC:H overcoated one.