The use of plasma immersion ion implantation (PIII) as a novel method for the treatment of polymer surfaces is investigated. The effect of PIII treatment on the coefficient of friction, contact angle modification, and surface energy of silicone and EPDM (ethylene-propylene-diene monomer) rubber are investigated as a function of pulse voltage, treatment time, and gas species. Low energy (0 - 8 keV) and high dose (∼1017 - 1018 ions/cm2) implantation of N2, Ar, and CF4 is performed using an inductively coupled plasma source (ICP) at low pressure (0.2 mTorr). PIII treatment reduces the coefficient of friction (μ) of silicone rubber from μ = 0.464 to the range μ = 0.176 – 0.274, and μ of EPDM rubber decreases from 0.9 to the range μ = 0.27 – 0.416 depending on processing conditions. The contact angle of water and diiodomethylene decreases after implantation and increases at higher doses for both silicone and EPDM rubber.