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1 results

  • Characterizat Ion of thin Pzt Films on Platinlm Films

  • Koichi Kugimiya, Ichiro Ueda, Kenji Iizima
  • Journal:
    MRS Online Proceedings Library Archive / Volume 243 / 1991
    Published online by Cambridge University Press:
    25 February 2011, 179
    Print publication:
    1991

  • Anomalous layers 20-40nm thick were found at the interfaces of lead zirconate-titanate films and Pt electrode films. Detailed study has shown evidence that absorption of PbO by Pt during sputtering resulted in a Pb deficiency in the PZT films and the formation of PbTi3O7 phase. The anomaly was also partly due to island formation at the initial PZT film deposition which allowed PbO to react with Pt films. The Pb controlled PZT films 50nm thick exhibited excellent ferroelectric properties comparable to thicker ones.